All processes are conducted under a clean environment. The Litho section is the most demanding user of SRON’s in-house clean room facility. Key parts of the processes form thin film deposition and micro-lithographic pattern transfer. Thin metal films (mostly Al, Au, Bi, Cu, Mo, Nb, Ta, Ti, but in principle every …
Ultrasensitive detectors, reliable electronics, inventive applications Space technology must be able to withstand the extremely harsh conditions in space. In a vacuum, exposed to highly energetic cosmic radiation and extreme temperature differences, space instruments must be capable of performing extremely precise measurements. Moreover, all of the components must be able to survive the launch and …
Bolometers KIDS LC filters Channel 16-020 Gratings The Litho section of the Instrument science group develops fabrication methods for sensors to be applied in future space-based astronomy or atmospheric research. The present focus is on the development and production of: Arrays of bolometers based on superconducting transition edge sensors for sub-mm/infrared detection. Processes include SiN micromachining …
Deposition Facilities BAS 450 Sputter deposition LLS801 Service aisle part Balzers BAK 640 Evaporator Pumping section of the BAK 640 BA510 Evaporator Introduction Thin-film deposition facilities are the key elements for high quality radiation sensor development. The quality of the layers and interfaces between layers determine the ultimate sensitivity of the sensor and the reproducibility …
Deposition Facilities Wet benches Inspection Reactive Ion Etcher Clean rooms form an essential infrastructure for space projects. Assembly of highly sophisticated electronic circuitry, fine mechanical parts and optical equipment require an environment where dust level, temperature, humidity and static electricity must be controlled carefully. Especially the fabrication of micron size structures by means of lithographic …
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