In this paper we describe microfabrication developments for a 1024 pixel calorimeter array, to be used in future X-ray spectroscopic space missions. We report on an optimization study of high packing factor, mushroom shaped, Cu/Bi absorbers, for which a sputter deposition technique into a new type of photoresist mould has been developed. We have fabricated a prototype 32×32 array where 98 representable pixels are potentially functioning TESs. To gain more control on the detector pixel performance a new procedure was developed to couple absorber and thermometer, utilizing a thin insulating layer. Advances are reported in the fabrication of superconducting LC resonating circuits, needed for frequency domain multiplexed read out. A quality factor Q∼4000 @ 2.6 MHz has been measured, which was limited by critical current in the circuit.
